The transition from αZr to αZrO2 growth in sputter‐deposited films as a function of gas O2 content, rare‐gas type, and cathode voltage
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.576261
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