Holographic characterization of colloidal particles in turbid media
Author:
Affiliation:
1. Spheryx, Inc., 330 E. 38th St., #48J, New York, New York 10016, USA
2. Department of Physics and Center for Soft Matter Research, New York University, New York, New York 10003, USA
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4999101
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1. Effect of Particle Size of Chemical Mechanical Polishing Slurries for Enhanced Polishing with Minimal Defects
2. Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP
3. A Review of Analytical Techniques for Identifying Contaminants in the Semiconductor Industry
4. Characterization of Low-Level, Oversize Particles in Abrasive Powders
5. Distortion of Single-Particle Optical Sensing (SPOS) Particle Count by Sub-Countable Particles
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