Fabrication of conductive single-crystal semiconductor nanoscale electromechanical structures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1484252
Reference18 articles.
1. Nanoelectromechanical Systems
2. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
3. Measurement of mechanical resonance and losses in nanometer scale silicon wires
4. Mechanical mixing in nonlinear nanomechanical resonators
5. Direct thermal conductance measurements on suspended monocrystalline nanostructures
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