X-ray spectroscopic study of SrTiOx films with different interlayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4809978
Reference71 articles.
1. SrTiO3 thin films by mocvd for 1 gbit DRAM application
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5. Dual layer SrTiO3/HfO2 gate dielectric for aggressively scaled band-edge nMOS devices
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