Spontaneous formation of highly periodic nano-ripples in inclined deposition of Mo/Si multilayers
Author:
Affiliation:
1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
2. Fraunhofer Institute for Material and Beam Technology, Winterbergstraße 28, 01277 Dresden, Germany
Funder
U.S. Department of Energy (DOE)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4991377
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