Texture in ITO films deposited at oblique incidence by ion beam sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference61 articles.
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2. Applications of texture in thin films;Knorr;JOM,1994
3. Development of texture in interconnect thin film stacks;Knorr;J. Vac. Sci. Technol. B,1998
4. Texture in thin film silicides and germanides: A review;Schutter;Appl. Phys. Rev.,2016
5. Controlling refractive index in AlN films by texture and crystallinity manipulation;Giba;Thin Solid Films,2017
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