Ammonia pretreatment for high-κ dielectric growth on silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1807024
Reference23 articles.
1. High-κ gate dielectrics: Current status and materials properties considerations
2. Alternative dielectrics to silicon dioxide for memory and logic devices
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4. Thermodynamic stability of binary oxides in contact with silicon
5. Materials Characterization of Alternative Gate Dielectrics
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