Characterizing dielectric properties of ultra-thin films using superconducting coplanar microwave resonators
Author:
Affiliation:
1. 1. Physikalisches Institut, Universität Stuttgart, D-70569 Stuttgart, Germany
2. Physikalisches Institut and Center for Quantum Science in LISA+, Universität Tübingen, D-72076 Tübingen, Germany
Funder
Deutsche Forschungsgemeinschaft
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5116904
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1. High-κ/Metal Gate Science and Technology
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2. Phase fluctuations in conventional superconductors;Journal of Physics: Condensed Matter;2021-12-02
3. Microwave probing of bulk dielectrics using superconducting coplanar resonators in distant-flip-chip geometry;Review of Scientific Instruments;2020-05-01
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