Rotational UV lithography device for cylindrical substrate exposure
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3043413
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4. Soft patterning on cylindrical surface of plastic optical fiber;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-11
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