Enhanced PtSi formation using a gold layer between Pt and Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98162
Reference18 articles.
1. Phase Transformations in Eutectic Gold-Silicon Alloys on Single-Crystal Silicon
2. LOW‐TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM
3. Photoemission investigation of the temperature effect on Si–Au interfaces
4. Low Temperature Reactions at Si-Metal Contacts –From SiO2Growth due to Si–Au Reaction to the Mechanism of Silicide Formation
5. Effect of CO on the Low Temperature Diffusion of Cr and Si Through Thin Gold Films
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2. Effect of deposition and treatment conditions on growth of nanometer PtSi heterostructure;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
3. Diffusion Synthesis of Silicides in Thin-Film Metal—Silicon Structures;Rapid Thermal Processing of Semiconductors;1997
4. Marker and radioactive silicon tracer studies of PtSi formation;Journal of Applied Physics;1992-09-15
5. Pt2Si formation: Diffusion marker and radioactive silicon tracer studies;Journal of Applied Physics;1990-01
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