Marker and radioactive silicon tracer studies of PtSi formation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351616
Reference27 articles.
1. Refractory silicides for integrated circuits
2. A self-aligned CoSi2interconnection and contact technology for VLSI applications
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4. Modification of nickel silicide formation by oxygen implantation
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3. Silicidation of Silicon Nanowires by Platinum;Nano Letters;2007-02-13
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