Construction and beam experiment of a compact storage ring at MELCO

Author:

Nakanishi T.,Ikegami K.,Kodera I.,Maruyama A.,Matsuda T.,Morita M.,Nakagawa T.,Nakamura S.,Nakata S.,Ohishi N.,Okuda S.,Shimohata K.,Takeuchi T.,Tanaka H.,Tsukishima C.,Yamamoto S.,Yokoyama S.,Yamada T.

Publisher

AIP Publishing

Subject

Instrumentation

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. SYNCHROTRON-RADIATION-SUPPORTED HIGH-ASPECT-RATIO NANOFABRICATION;COSMOS;2007-11

2. Extreme expansion of proximity gap by double exposures using enlarged pattern masks for line and space pattern formation in x-ray lithography (evolution of exposure method to symmetric illumination);Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003

3. Effect of secondary electron from the substrate in x-ray lithography using harder radiation spectra;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001

4. A superconducting magnet for a compact synchrotron radiation ring;Electrical Engineering in Japan;1999-01-15

5. X-ray lithography: Status, challenges, and outlook for 0.13 μm;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11

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