Contrast enhancement of modulated optical reflectance microscopy of semiconductor devices
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1512962
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1. Chapter 7 Laser Optical and Photothermal Thermometry of Solids and Thin Films;Experimental Methods in the Physical Sciences;2009
2. Quantitative Thermoreflectance Imaging: Calibration Method and Validation on a Dedicated Integrated Circuit;IEEE Transactions on Components and Packaging Technologies;2007-12
3. Thermoreflectance temperature imaging of integrated circuits: calibration technique and quantitative comparison with integrated sensors and simulations;Journal of Physics D: Applied Physics;2006-09-18
4. Advances in thermal wave based microscopy;Journal de Physique IV (Proceedings);2005-06
5. Higher harmonic thermal wave detection in thermoreflectance microscopy with combined electrical and optical heating;Superlattices and Microstructures;2004-03
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