Author:
Vanderstraeten H.,Bruynseraede Y.,Wu M. F.,Vantomme A.,Langouche G.,Phillips J. M.
Subject
Physics and Astronomy (miscellaneous)
Cited by
33 articles.
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1. Optimizing the growth of CoSi2 film with oxide-mediated CoSi2 template by silicon cap layer;Journal of Crystal Growth;2009-08
2. Growth of oxide-mediated ternary silicide controlled by a Si cap layer by rapid thermal annealing;Physica E: Low-dimensional Systems and Nanostructures;2008-01
3. Metal Silicides in CMOS Technology: Past, Present, and Future Trends;Critical Reviews in Solid State and Materials Sciences;2003-11
4. Irradiation induced growth of CoSi2 precipitates in Si at 650°C: An in situ study;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-12
5. Influence of damage on the formation of CoSi2 by Co implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-06