Aligned and twinned orientations in epitaxial CoSi2layers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104212
Reference16 articles.
1. Epitaxial Silicides: a Summary of Recent Developments
2. Mesotaxy: Synthesis of buried single-crystal silicide layers by implantation
3. Epitaxial silicides
4. Growth of single‐crystal CoSi2on Si(111)
5. Formation of buried epitaxial Co silicides by ion implantation
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3. Metal Silicides in CMOS Technology: Past, Present, and Future Trends;Critical Reviews in Solid State and Materials Sciences;2003-11
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