Hydrogen injection and neutralization of boron acceptors in silicon boiled in water
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96476
Reference17 articles.
1. Neutralization of Shallow Acceptor Levels in Silicon by Atomic Hydrogen
2. Neutralization of acceptors in silicon by atomic hydrogen
3. Bulk acceptor compensation produced inp‐type silicon at near‐ambient temperatures by a H2O plasma
4. Study of the atomic models of three donor‐like traps on oxidized silicon with aluminum gate from their processing dependences
5. Deactivation of the boron acceptor in silicon by hydrogen
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