Effect of complex formation on diffusion of arsenic in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1661873
Reference17 articles.
1. Interactions in Sequential Diffusion Processes in Semiconductors
2. Arsenic Isoconcentration Diffusion Studies in Silicon
3. Concentration dependent diffusion of arsenic in silicon
4. Arsenic Clustering in Silicon
5. A STUDY OF DIFFUSED LAYERS OF ARSENIC AND ANTIMONY IN SILICON USING THE ION‐SCATTERING TECHNIQUE
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