Arsenic Isoconcentration Diffusion Studies in Silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1658001
Reference21 articles.
1. Ueber Diffusion
2. Detailed analysis of thin phosphorus-diffused layers in p-type silicon
3. Diffusion of Boron into Silicon
4. Diffusant impurity-concentration profiles in thin layers on silicon
5. The Diffusion of Phosphorus in Silicon
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