Structural differences between deuterated and hydrogenated silicon nitride/oxynitride
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1364645
Reference20 articles.
1. Reduction of hot electron degradation in metal oxide semiconductor transistors by deuterium processing
2. Reduced light‐induced changes of photoconductivity in duterated amorphous silicon
3. Light‐induced changes in hydrogenated and deuterated amorphous silicon films and solar cells
4. Comment on ‘‘Reduction of hot electron degradation in metal oxide semiconductor transistors by deuterium processing’’ [Appl. Phys. Lett. 68, 2526 (1996)]
5. A possible mechanism for improved light-induced degradation in deuterated amorphous-silicon alloy
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