Estimation of the dielectric properties of low-k materials using optical spectroscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1408607
Reference13 articles.
1. Low dielectric constant plasma polymerized methyl-cyclohexane thin films deposited by inductively coupled plasma-enhanced chemical vapor deposition
2. Poly(tetraflouro-p-xylylene), a low dielectric constant chemical vapor polymerized polymer
3. Comparative Study of Hydrido Organo Siloxane Polymer and Hydrogen Silsesquioxane
4. Low dielectric constant Parylene-F-like films for intermetal dielectric applications
5. Novel Porous Films Having Low Dielectric Constants Synthesized by Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics
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