Poly(tetraflouro-p-xylylene), a low dielectric constant chemical vapor polymerized polymer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120703
Reference10 articles.
1. A new method for fabricating high performance polymeric thin films by chemical vapor polymerization
2. Optical properties of polymeric thin films grown by chemical vapor deposition
3. Room temperature copolymerization to improve the thermal and dielectric properties of polyxylylene thin films by chemical vapor deposition
4. Synthesis of functional substituted polycarbosilanes based on silyltriflate derivatives
5. α α’ α‘ αʹʹʹ Poly-tetrafluoro-p-xylylene as an interlayer dielectric for thin film multichip modules and integrated circuits
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