Local silicon molecular beam epitaxy with microshadow masks
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109422
Reference6 articles.
1. Silicon Layers Grown by Differential Molecular Beam Epitaxy
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2. Films by Molecular-Beam Epitaxy;Silicon;2004
3. Direct growth of nanostructures by deposition through an Si3N4 shadow mask;Physica E: Low-dimensional Systems and Nanostructures;1999-07
4. Formation of single-crystalline silicon nanostructures by self-assembling growth with molecular beam epitaxy;Applied Surface Science;1998-06
5. The growth of nanometer Si/SiGe/Si quantum well wires with local molecular beam epitaxy in dependence on the shadow mask geometry;Journal of Crystal Growth;1996-10
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