Dependences of Young’s modulus of porous silica low dielectric constant films on skeletal structure and porosity
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2401660
Reference39 articles.
1. Novel Porous Films Having Low Dielectric Constants Synthesized by Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics
2. Dehydration after Plasma Oxidation of Porous Low-Dielectric-Constant Spin-on-Glass Films
3. Chemical Vapor Deposition Based Preparation on Porous Silica Films
4. Effects of Surfactants on the Properties of Ordered Periodic Porous Silica Films
5. A simple sol–gel route for the preparation of silica–surfactant mesostructured materials
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