Study of laser excited vibration of silicon cantilever
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2987470
Reference31 articles.
1. On the micromechanics of micro-cantilever sensors: Property analysis and eigenstrain modeling
2. Piezoelectric-excited millimeter-sized cantilever sensors detect density differences of a few micrograms/mL in liquid medium
3. Optimization of antibody immobilization for sensing using piezoelectrically excited-millimeter-sized cantilever (PEMC) sensors
4. Piezoelectric-excited millimeter-sized cantilever (PEMC) sensors detect Bacillus anthracis at 300spores/mL
5. Detection of Staphylococcus enterotoxin B at picogram levels using piezoelectric-excited millimeter-sized cantilever sensors
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