Deposition of dense hydrocarbon films from a nonbiased microwave plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108525
Reference11 articles.
1. Diamond and diamondlike films: Deposition processes and properties
2. rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications
3. Carbon deposition using an expanding cascaded arc d.c. plasma
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