Investigation of a nitrogen post-discharge of an atmospheric-pressure microwave plasma torch by optical emission spectroscopy
Author:
Affiliation:
1. Key Laboratory of Material Modification by Laser, Ion, Electron Beams (Dalian University of Technology), Ministry of Education, Dalian 116024, China
2. School of Physics, Dalian University of Technology, Dalian 116024, China
Funder
National Natural Science Foundation of China (NSFC)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4978948
Reference41 articles.
1. Active species in microwave postdischarge for steel-surface nitriding
2. Deposition of dense hydrocarbon films from a nonbiased microwave plasma
3. Characterization of the flowing afterglows of an N2–O2reduced-pressure discharge: setting the operating conditions to achieve a dominant late afterglow and correlating the NOβUV intensity variation with the N and O atom densities
4. A microwave plasma torch and its applications
5. Microwave discharges: generation and diagnostics
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