Stresses arising from a solid state reaction between palladium films and Si(001) investigated byin situcombined x-ray diffraction and curvature measurements
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1590059
Reference33 articles.
1. Stresses during Silicide Formation: A Review
2. Insitustress measurement of refractory metal silicides during sintering
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4. Reaction of Mo Thin Films on Si (100) Surfaces
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