Multi-fluid simulation models for inductively coupled plasma sources
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http://aip.scitation.org/doi/pdf/10.1063/1.4995707
Reference11 articles.
1. M. A. Lieberman and A. J. Lichtenberg, Principles of plasma discharges and materials processing (John Wiley & Sons, 2005).
2. Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma
3. An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell
4. Modeling Radio Communication Blackout and Blackout Mitigation in Hypersonic Vehicles
5. Ion source antenna development for the Spallation Neutron Source
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions;AIP Advances;2019-08
2. Global model of a negative hydrogen ion source with caesiated plasma grid;AIP Conference Proceedings;2018
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