Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions-Reference-Cited by-同舟云学术

Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

Published:2019-08 Issue:8 Volume:9 Page:085228
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Lei Fan¹,Li Xiaoping¹,Liu Donglin¹^ORCID,Liu Yanming¹,Zhang Shun¹

Affiliation:

1. Key Laboratory of Information and Structure Efficiency in Extreme Environment, Ministry of Education, School of Aerospace Science and Technology, Xidian University, Xi’an Shaanxi 710071, China

Funder

Aerospace T. T. &. C. Innovation Program

China Postdoctoral Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5118911

Reference18 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell

3. Two-dimensional fluid model of high density inductively coupled plasma sources

4. Two-dimensional simulation of a miniaturized inductively coupled plasma reactor

5. Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas

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