Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4953647
Reference32 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Physics of Radio-Frequency Plasmas
3. Review of inductively coupled plasmas for plasma processing
4. The transition from the first to the second stage of the ring discharge
5. On the E - H mode transition in RF inductive discharges
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