Calculation of composition of dilute cosputtered multicomponent films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1662105
Reference4 articles.
1. The ?multiple-sample concept? in materials research: Synthesis, compositional analysis and testing of entire multicomponent systems
2. Compositional Determination of rf Co-Sputtered Multicomponent Systems
3. Calculation of Deposition Profiles and Compositional Analysis of Cosputtered Films
4. Distribution of Material Sputtered from a Disk Electrode
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