In-plane excitation of thin silicon cantilevers using piezoelectric thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2805070
Reference8 articles.
1. Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation
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3. Circular test structure for the determination of piezoelectric constants of Sc x Al 1−x N thin films applying Laser Doppler Vibrometry and FEM simulations;Sensors and Actuators A: Physical;2015-02
4. Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode;Sensors and Actuators B: Chemical;2014-09
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