Determination of piezoelectric coefficients and elastic constant of thin films by laser scanning vibrometry techniques-Reference-Cited by-同舟云学术

Determination of piezoelectric coefficients and elastic constant of thin films by laser scanning vibrometry techniques

Published:2007-04 Issue:2 Volume:135 Page:660-665
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Huang Z.,Leighton G.,Wright R.,Duval F.,Chung H.C.,Kirby P.,Whatmore R.W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

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2. Ultrasonic flexural Lamb-wave actuators based on PZT thin film;Lugienbuhl;Sens. Actuators A,1998

3. A micromachined sensor array using thin film resonators;Xia,1995

4. Thin-film bulk acoustic resonators and filters using ZnO and lead–zirconium–titanate thin films;Su;IEEE-MMT,2001

5. Longitudinal piezoelectric coefficient measurement for bulk ceramics and thin films using pneumatic pressure rig;Xu;J. Appl. Phys.,1999

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