Deep-learning-aided extraction of optical constants in scanning near-field optical microscopy

Author:

Zhao Y.1ORCID,Chen X.2ORCID,Yao Z.23ORCID,Liu M. K.24ORCID,Fogler M. M.1ORCID

Affiliation:

1. Department of Physics, University of California San Diego 1 , 9500 Gilman Drive, La Jolla, California 92093, USA

2. Department of Physics and Astronomy, Stony Brook University 2 , Stony Brook, New York 11794, USA

3. Advanced Light Source Division, Lawrence Berkeley National Laboratory 3 , Berkeley, California 94720, USA

4. National Synchrotron Light Source II, Brookhaven National Laboratory 4 , Upton, New York 11973, USA

Abstract

Scanning near-field optical microscopy is one of the most effective techniques for spectroscopy of nanoscale systems. However, inferring optical constants from the measured near-field signal can be challenging because of a complicated and highly nonlinear interaction between the scanned probe and the sample. Conventional fitting methods applied to this problem often suffer from the lack of convergence or require human intervention. Here, we develop an alternative approach where the optical parameter extraction is automated by a deep learning network. The network provides an initial estimate that is subsequently refined by a traditional fitting algorithm. We show that this method demonstrates superior accuracy, stability against noise, and computational speed when applied to simulated near-field spectra.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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