Oblique angle deposition of Au/Ti porous getter films
Author:
Affiliation:
1. Department of Microelectronics, Soochow University, Suzhou 215006, China
2. Center for Nanoscience and Nanotechnology (C2N), CNRS, Univ. Paris-Sud, Université Paris-Saclay, 91405 Orsay cedex, France
Funder
Natural Science Fund for Colleges and Universities in Jiangsu Province of China
Natural Science Foundation of Jiangsu Province
Agence Nationale de la Recherche
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5044570
Reference21 articles.
1. Vacuum quality evaluation for uncooled micro bolometer thermal imager sensors
2. Miniature and MEMS-type vacuum sensors and pumps
3. Deposition and Characterization of Ti-Zr-V Non-Evaporable Getter Films
4. High‐porosity coated getter
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