Deposition and Characterization of Ti-Zr-V Non-Evaporable Getter Films
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference11 articles.
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3. Anashin VV, Collins IR, Dostovalova RV, et al. Comparative study of photodesorption from TiZrV coated and uncoated stainless steel vacuum chambers. Vacuum 2004, 75(2):155-159.
4. Benvenuti C, Chiggiato P, Cicoira F, et al. Decreasing surface outgassing by thin film getter coatings. Vacuum 1998, 50(1-2):57-63.
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