Micro-Raman and ultraviolet ellipsometry studies on μc-Si:H films prepared by H2 dilution to the Ar-assisted SiH4 plasma in radio frequency glow discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1539292
Reference45 articles.
1. Microcrystalline Si: H Film and Its Application to Solar Cells
2. Deposition of phosphorus doped microcrystalline silicon below 70 °C at 70 MHz
3. On the Way Towards High Efficiency Thin Film Silicon Solar Cells by the “Micromorph” Concept
4. Control of hydrogenation and modulation of the structural network in Si:H by interrupted growth and H-plasma treatment
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