Interface trap density evaluation on bare silicon-on-insulator wafers using the quasi-static capacitance technique
Author:
Affiliation:
1. IMEP-LAHC, Minatec, Univ. Grenoble Alpes, CNRS, F-38000 Grenoble, France
2. School of Electrical, Electronic and Computer Engineering, The University of Western Australia, Crawley, Western Australia 6009, Australia
Funder
Soitec
WayToGo Fast
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4947498
Reference39 articles.
1. Smart-Cut® technology: from 300 mm ultrathin SOI production to advanced engineered substrates
2. Electrical Characterization of Silicon-on-Insulator Materials and Devices
3. Point-contact pseudo-MOSFET for in-situ characterization of as-grown silicon-on-insulator wafers
4. S. T. Liu , P. S. Fechner , and R. L. Roisen , in IEEE SOS/SOI Technology Conference (1990), pp. 61–62.
5. A review of the pseudo-MOS transistor in SOI wafers: operation, parameter extraction, and applications
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Correlation between resistive switching characteristics and density of traps observed in Zr3N2 resistive switching memory devices with TiN barrier electrode;Ceramics International;2022-07
2. Novel SOI Based Pseudo-Inverter: Experimental and Simulation Research;2022 China Semiconductor Technology International Conference (CSTIC);2022-06-20
3. Variability of Electron and Hole Spin Qubits Due to Interface Roughness and Charge Traps;Physical Review Applied;2022-02-08
4. Improved Resistive Switching Observed in Ti/Zr3N2/p-Si Capacitor via Hydrogen Passivation;IEEE Access;2022
5. Effect of Channel Engineering on Quasi-Static Capacitance-Voltage Characteristics of Double-Gate MOSFET;Journal of Electronic Materials;2020-07-21
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3