Optical emission spectroscopy during the deposition of zirconium dioxide films by controlled reactive high-power impulse magnetron sputtering
Author:
Affiliation:
1. Department of Physics and NTIS – European Centre of Excellence, University of West Bohemia, Univerzitní 8, Plzeň 306 14, Czech Republic
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference60 articles.
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