Measurement of the electron energy distribution function in CO2 inductively coupled plasma
Author:
Affiliation:
1. Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea
Funder
Korea Electric Power Corporation
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5125423
Reference42 articles.
1. Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models
2. Hysteresis and the E-to-H transition in radiofrequency inductive discharges
3. Theoretical estimation and experimental studies on gas dissociation in TEA CO2 laser for long term arc free operation
4. Optical characterization of a microwave pulsed discharge used for dissociation of CO2
5. Carbon Dioxide Splitting in a Dielectric Barrier Discharge Plasma: A Combined Experimental and Computational Study
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