Affiliation:
1. Department of Applied Physics, Korea University, 2511 Sejong-ro, Sejong 30019, Republic of Korea
Abstract
A close-packed micro-lens array (MLA) is widely used not only in novel optical systems but also in various engineering fields, such as semiconductors and display devices. In this paper, we present a simple and efficient method for fabricating MLAs on a glass substrate via laser ablation with a single femtosecond laser pulse and chemical wet etching in a hydrofluoric acid solution. The shapes of concave micro-lenses were optimized for laser pulse energy and etching time, and ∼70 000 micro-lenses with 15 µm diameter were formed. The shape of the micro-lens varies significantly with respect to the etching time in accordance with an initial ablated area (or laser energy), which is a key feature in fabricating micro-lenses of several tens of μm. Using the glass MLA as a mold, a polydimethylsiloxane convex-plano lens array was replicated, and the performance of the optical imaging and beam integrator was then examined.
Funder
Korea Institute of Energy Technology Evaluation and Planning
Korea Evaluation Institute of Industrial Technology
Subject
General Physics and Astronomy
Cited by
2 articles.
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