Optical and electrical characterizations of laser–chemical‐vapor‐deposited aluminum oxynitride films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336905
Reference17 articles.
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4. Preliminary investigations of Reactively Evaporated Aluminum Oxide Films on Silicon
5. Photodeposition of aluminum oxide and aluminum thin films
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