Insituspectroscopic ellipsometry investigation of the nucleation of microcrystalline silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.97757
Reference11 articles.
1. Microcrystalline Si: H Film and Its Application to Solar Cells
2. GROWTH OF PLASMA-TRANSPORT MICROCRYSTALLINE SILICON AS STUDIED BY IN-SITU RAMAN SPECTROSCOPY
3. Structure Change of Microcrystalline Silicon Films in Deposition Process
4. Transformation of microcrystalline state of hydrogenated silicon to amorphous one due to presence of more electronegative impurities
5. Insituinvestigation of the nucleation of microcrystalline Si
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