Oxide driven strength evolution of silicon surfaces-Reference-Cited by-同舟云学术

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Oxide driven strength evolution of silicon surfaces

Published:2015-11-21 Issue:19 Volume:118 Page:195304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Grutzik Scott J.¹,Milosevic Erik²,Boyce Brad L.³,Zehnder Alan T.¹

Affiliation:

1. Field of Theoretical and Applied Mechanics, Cornell University, Ithaca, New York 14853, USA

2. Department of Nanoengineering, SUNY Polytechnic University, Albany, New York 12203, USA

3. Sandia National Laboratories, Albuquerque, New Mexico 87185-0889, USA

Funder

National Science Foundation (NSF)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4936118

Reference44 articles.

1. Fracture strength of micro- and nano-scale silicon components

2. Stress in silicon dioxide films deposited using chemical vapor deposition techniques and the effect of annealing on these stresses

3. Effect of surface morphology on the fracture strength of silicon nanobeams

4. Methyl monolayers improve the fracture strength and durability of silicon nanobeams

5. Very high-cycle fatigue failure in micron-scale polycrystalline silicon films: Effects of environment and surface oxide thickness

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1. Uniting Ultrahigh Plasticity with Near‐Theoretical Strength in Submicron‐Scale Si via Surface Healing;Advanced Functional Materials;2024-05-20

2. The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing;Micromachines;2021-09-13

3. Effect of oxidation on crack propagation of Si nanofilm: A ReaxFF molecular dynamics simulation study;Applied Surface Science;2019-06

4. Biaxial flexure testing of free-standing thin film membrane with nanoindentation system;Sensors and Actuators A: Physical;2018-08

5. Effect of interface reaction and diffusion on stress-oxidation coupling at high temperature;Journal of Applied Physics;2018-04-21

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