Comparison of plasma excitation, ionization, and energy influx in single and dual frequency capacitive discharges-Reference-Cited by-同舟云学术

Comparison of plasma excitation, ionization, and energy influx in single and dual frequency capacitive discharges

Published:2016-12 Issue:12 Volume:23 Page:123504
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Sahu B. B.¹,Han Jeon G.¹

Affiliation:

1. Department of Advanced Materials Science and Engineering, Center for Advanced Plasma Surface Technology (CAPST), NU-SKKU Joint Institute for Plasma Nano Materials, Sungkyunkwan University, Suwon, 440-746, Korea

Funder

Ministry of Science, ICT and Future Planning (MSIP)

Ministry of Trade, Industry and Energy (MOTIE)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4969088

Reference67 articles.

1. A novel electrostatic probe method for ion flux measurements

2. Plasma–surface interactions

3. Electron heating in capacitively coupled plasmas revisited

4. Low temperature synthesis of silicon quantum dots with plasma chemistry control in dual frequency non-thermal plasmas

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