Ge-fraction-dependent metal-induced lateral crystallization of amorphous-Si1−xGex (0≦x≦1) on SiO2
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1564298
Reference12 articles.
1. Solid-phase crystallization of Si1−xGex alloy layers
2. Solid-phase crystallization of amorphous SiGe films deposited by LPCVD on SiO2 and glass
3. Al-Induced Crystallization of an Amorphous Si Thin Film in a Polycrystalline Al/Native SiO2/Amorphous Si Structure
4. Pd induced lateral crystallization of amorphous Si thin films
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