On the Ohmic-dominant heating mode of capacitively coupled plasma inverted by boundary electron emission

Author:

Zhang Shu1ORCID,Sun Guang-Yu2ORCID,Chen Jian3,Sun Hao-Min4ORCID,Sun An-Bang1ORCID,Zhang Guan-Jun1ORCID

Affiliation:

1. State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China

2. Ecole Polytechnique Fédérale de Lausanne (EPFL), Swiss Plasma Center (SPC), CH-1015 Lausanne, Switzerland

3. Sino-French Institute of Nuclear Engineering and Technology, Sun Yat-sen University, Zhuhai 519082, China

4. Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersey 08543, USA

Abstract

Electron emission from the boundary is ubiquitous in a capacitively coupled plasma (CCP) and precipitates nonnegligible influence on the discharge properties. Here, we present Particle-in-Cell/Monte Carlo Collision simulation of an Ohmic-dominant heating mode of the capacitively coupled plasma, where the stochastic heating vanishes and only Ohmic heating sustains the discharge due to sheath inversion by boundary electron emission. The inverted CCP features negative sheath potential without Bohm presheath, hence excluding plasma heating due to sheath edge oscillation. The particle and energy transport of the proposed heating mode is analyzed. The influence of boundary electron emission flux, source voltage, and neutral pressure on the transition between classic and Ohmic-dominant CCP heating modes is shown with designated simulation scans. A modified inverse sheath–plasma coupling due to excessive ionization is discovered. In the end, key indicators of the proposed heating mode in plasma diagnostics are provided for future experimental verifications.

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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