Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers-Reference-Cited by-同舟云学术

Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers

Published:2016-04-25 Issue:17 Volume:108 Page:171903
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Yoshikawa Taro¹²,Reusch Markus¹²,Holc Katarzyna¹,Iankov Dimitre¹²,Zuerbig Verena¹,Zukauskaite Agne¹^ORCID,Nebel Christoph E.¹,Ambacher Oliver¹²,Lebedev Vadim¹

Affiliation:

1. Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany

2. Department of Microsystems Engineering—IMTEK, University of Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany

Funder

Deutsche Forschungsgemeinschaft (DFG)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4948343

Reference17 articles.

1. Are Diamonds a MEMS' Best Friend?

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4. J. Wang , J. E. Butler , D. S. Y. Hsu , and C. T.C. Nguyen , in Technical Digest, 2002 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, South Carolina, 2–6 June (2002), pp. 61–62.

5. High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping

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