Electron cyclotron resonance harmonics and wall material effects in a microwave discharge
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1611613
Reference17 articles.
1. The efficient inject of high microwave powers into the overdense magnetoactive plasma in the waveguide
2. Very high current ECR ion source for an oxygen ion implanter
3. Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream
4. Effects of magnetic field and microwave power on electron cyclotron resonance‐type plasma characteristics
5. ECR Plasma CVD in Different Magnetic Field Configurations
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