Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream-Reference-Cited by-同舟云学术

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Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream

Published:1988-01 Issue:1 Volume:6 Page:25-29
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Matsuoka Morito,Ono Ken’ichi

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.574990

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