Electrical properties of laser chemically doped silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.92572
Reference5 articles.
1. Ohmic contact formation on InP by pulsed laser photochemical doping
2. Efficient Si solar cells by laser photochemical doping
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4. Arsenic diffusion in silicon melted by high‐power nanosecond laser pulsing
5. UV photolysis of van der waals molecular films
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